Product Info

The DAIHEN FLB-60M-03 0190-19674 is a high-precision industrial microprocessor control board integrated into legacy 60 MHz high-frequency radio frequency (RF) plasma power management networks. This hardware acts as the computational engine for automated matching networks, which actively track complex impedance variations between an industrial RF generator and a vacuum processing chamber. By continuously executing closed-loop algorithms, the board calculates real-time compensation coordinates, driving motor adjustments and phase tuners to maximize forward power transmission, minimize reflected power, and sustain stable plasma ignition during micro-fabrication.

System Operating Frequency: 60 MHz

Logic Processing Rail Input: Draws standard +5 VDC (±5%) voltage

Analog Driving Voltage Rails: Requires +15 VDC and -15 VDC secondary power inputs

Analog Capture Resolution: Onboard analog-to-digital data channels utilize 12-bit conversion matrices

Operating Ambient Temperature: 15°C to +40°C

Storage Temperature Range: -10°C to +60°C

Relative Humidity Limit: 20% to 80% RH (non-condensing)

EMERSON

ABB

SIEMENS

PR6426-010-000 CON021-916-160

SA801F 3BDH000011R1

6AV6542-0AG10-0AX0

1B30035H01

IMFEC11

6AV2124-0MC01-0AX0

A6210

NI0C01 3BSE005735R1

6ES5314-3UA11

SP1406

SAFT171PAC

6AV3627-1LK00-1AX0

8752-CA-NS-02

PFUK104-YM110002-SD

6DS1200-8BA

PR6423'01K-010 CON021

PFSK101 YM322001-ED

6ES7334-0CE01-0AA0

38B6041X082

HIEE400109R1 HI022755-310 CS A465 AE01

6ES7317-2EK14-0AB0

5X00109G02

NTCF02

6EP1931-2FC21

PR6423-013-010 CON021

PFUK108 YM110001-SH

6ES7332-8TF01-0AB0

HD11010-3A

PM860AK01 3BSE066495R1

6EP3437-8SB00-0AY0

KJ4005X1-BC1 12P4680X032

NDCU-21 63985317B

6ES7321-1BH02-0AA0

5X00790G01

C87-11006

6EP1334-3BA10