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MKS 902-1112 Absolute Piezo Vacuum Transducer

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MKS 902-1112 Absolute Piezo Vacuum Transducer

902-1112
Condition:
New Original
In stock:
25
Weight
0.097kg
Demension
5.6x2.9x2.9cm
  • Product details
  • Specifications
  • Recommand
  • Service & Policy
Product category: MKS Instruments HPS® Series 902 / 902B Piezo Transducer family
Product status: New and Original
Tariff code: 85371091
Product description:
MKS 902-1112 Absolute Piezo Vacuum Transducer
The MKS 902-1112 is a gas-independent 1000-Torr absolute piezo vacuum transducer. Operating on 12-30VDC, this compact MKS 902-1112 sensor delivers linear 0-10VDC analog outputs and relay process control inside automated semiconductor and coating systems.
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Product Infor

The MKS 902-1112 is a compact, self-contained absolute piezo vacuum gauge designed to deliver precise total pressure measurements independent of gas type. The device integrates advanced MEMS-based piezoresistive sensor technology with an internal stainless steel diaphragm and high-speed processing electronics. Because it operates via mechanical diaphragm deflection, it maintains structural stability against aggressive or corrosive process environments without requiring gas calibration curves.

Absolute Measurement Range:

0.1 to 1,000 Torr Full Scale.

Operating Power Requirements:

Runs on a continuous input supply window of 12 to 30 V DC.

Current Consumption:

Draws a nominal current of approximately 30 mA.

Power Consumption:

Extremely low thermal footprint, consuming less than 0.5 Watts maximum.

Maximum Overpressure Limit:

Withstands transient pressure shocks up to 2,000 Torr without degradation.

Maximum Output Impedance:

1 kΩ maximum interface load limit.

Relay Contact Rating:

Rated up to 1 A at 30V AC/DC resistive loads.

Environmental Operating Temperature:

Standard indoor automated lab boundaries from 0 °C to +50 °C.

 

Application

v Semiconductor Manufacturing: Installed inside load-lock, transfer chambers, and ambient etching lines to maintain fast gas-independent background measurements.

v Vacuum Freeze-Drying (Lyophilization): Deployed inside pharmaceutical and high-end biotechnology freeze-dryers to govern primary sublimation pressure matrices.

v Thin-Film Coatings & Industrial Chambers: Configured along optical glass or automotive thermal vacuum coating systems to handle continuous atmospheric monitoring independent of changing residual process gases.

v Analytical Instruments & Test Stations: Integrated into lamp and light bulb production lines, mass spectrometers, and leak-testing stations due to its solid-state resistance to sudden air inrushes or mechanical shocks.

Main Brands

We have large of inventory for our company's advantage products.

BENTLY EPRO ALL SERIES OF PRODUCTS SPAR PARTS PROBE Proximitor

PLC: AB, ABB, GE, Schneider

DCS: ABB, Siemens, MOORE, Foxboro, Westinghouse, YOKOGAWA

ESD: Triconex, HIMA, BENTLY, ICS

Excitation cards: ABB, GE Marke

 

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Disclaimer: Ewolomodule sells new and surplus products and develops channels for purchasing such products. This website has not been approved or recognized by any of the listed manufacturers or trademarks.Ewolomodule is not an authorized distributor, dealer, or representative of the products displayed on this website. All product names, trademarks, brands, and logos used on this website are the property of their respective owners. The description, explanation, or sale of products with these names, trademarks, brands, and logos is for identification purposes only and is not intended to indicate any association with or authorization from any rights holder.

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