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MKS MC20A-30134 Digital Mass Flow Controller

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MKS MC20A-30134 Digital Mass Flow Controller

MC20A-30134
Condition:
New Original
In stock:
25
Weight
1.1kg
Demension
13.5x4x17cm
  • Product details
  • Specifications
  • Recommand
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Product category: MKS Instruments ALTA™ High Flow Thermal Mass Flow Controller Series
Product status: New and Original
Tariff code: 85371091
Product description:
MKS MC20A-30134 Digital Mass Flow Controller
The MKS MC20A-30134 is a 24VDC digital high-flow thermal mass flow controller. Utilizing DeviceNet protocols, the MKS MC20A-30134 provides ultra-fast gas settling and 1% setpoint accuracy for semiconductor applications.
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Product Introduction

The MKS Instruments MC20A-30134 is an all-digital, high-performance thermal mass flow controller engineered. Part of the ALTA™ product family, this device integrates a specialized thermal mass flow sensor, a fast-acting closed-loop feedback controller, and an all-metal sealed control valve into a single compact footprint. Designed to satisfy strict tool throughput and precise chamber-matching requirements, the unit boasts ultra-fast gas settling times and features an on-board multi-gas calibration memory bank.

 

Input Voltage Required: 11 to 25 VDC

Maximum Steady-State Current: 475 mA maximum current draw

Normal Operating Pressure Differential: 10 to 40 psid

Operating Temperature Limits: 0 °C to +50 °C (32 °F to 122 °F) standard operational cabinet margin

Storage Temperature Envelope: -20 °C to +65 °C (-4 °F to 149 °F)

Analog Flow Input/Output Signaling: 0 to 5 VDC setpoint command and output tracking loop

 

Applications by Industry

Semiconductor Device Fabrication:

Deployed extensively inside gas delivery sticks to feed exact masses of process gases into chemical vapor deposition (CVD) and plasma etching tool chambers.

High-Purity Thin-Film Coating:

Integrated within optical lens, glass, and solar cell manufacturing paths to ensure uniform film layer growth through steady mass flow parameters.

Pharmaceutical and Medical Manufacturing:

Implemented within cleanroom environments to maintain a strict balance of specialized carrier gases during drug synthesis and medical device vacuum treatments.

Gas Blending and Distribution Utilities:

Used as a localized digital node to continuously regulate multi-gas supply streams, logging real-time telemetry back to a centralized PLC master node via DeviceNet protocols.

Industry & Brand

✅ Petroleum, Chemical Plants: ABB, Bently Nevada, HIMA, Invensys, Westinghouse, Philips

✅ Marine/Marine Vessels: ABB, GE

✅ Subways, Railways: AB (Allen-Bradley), Schneider, Invensys

✅ Glass Plants: AB (Allen-Bradley)

✅ Printing Plants: AB (Allen-Bradley), GE

✅ Hydroelectric Power Plants: AB (Allen-Bradley), GE, Schneider

✅ Cement Plants: AB (Allen-Bradley), Schneider

✅ Wind Power Plants: ABB, Bachmann

✅ Nuclear Power: AB (Allen-Bradley), ABB, Invensys, Emerson

✅ Thermal Power, Steel Mills: Honeywell, ABB

 

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Service for you

✅ 10 years sales experience in control system components field.

✅ High efficiency application.

✅ Reduce the intermediate links between each other.

✅ Professional sales team and quality customer service team.

✅ Wide products range, nearly 70 million inventory parts for customers worldwide.

✅ Competitive price.

 

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Ewolomodule sells new and surplus products and develops channels for purchasing such products. This website has not been approved or recognized by any of the listed manufacturers or trademarks. Ewolomodule is not an authorized distributor, dealer, or representative of the products displayed on this website. All product names, trademarks, brands, and logos used on this website are the property of their respective owners. The description, explanation, or sale of products with these names, trademarks, brands, and logos is for identification purposes only and is not intended to indicate any association with or authorization from any rights holder.

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Disclaimer: Ewolomodule sells new and surplus products and develops channels for purchasing such products. This website has not been approved or recognized by any of the listed manufacturers or trademarks.Ewolomodule is not an authorized distributor, dealer, or representative of the products displayed on this website. All product names, trademarks, brands, and logos used on this website are the property of their respective owners. The description, explanation, or sale of products with these names, trademarks, brands, and logos is for identification purposes only and is not intended to indicate any association with or authorization from any rights holder.

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