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Product category: Brooks Instrument / Mykrolis XacTorr® CMX45 Series

Product status: New and Original

Tariff code: 85371091

Product description:

MYKROLIS CMX45 Capacitance Pressure Transducer

The heated CMX45 is a digital absolute capacitance pressure transducer. Operating on ±15VDC, the 45°C-regulated CMX45 utilizes advanced DSP technology to deliver gas-independent, low-drift vacuum measurement within corrosive semiconductor fabrication lines.

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WhatsApp:+86 17359287459

Email:sales15@amikon.cn

Add:Siming district , Xiamen , Fujian,China

Product CMX45|Capacitance Pressure Transducer

The MYKROLIS CMX45 is an industrial-grade, heated digital absolute capacitance pressure transducer engineered to perform highly repeatable vacuum measurements in demanding thin-film and semiconductor manufacturing processes. Driven by an advanced Digital Signal Processor (DSP) architecture, this device eliminates the manual potentiometers and component drift common to legacy analog gauges. It features a patented corrosion-resistant Mark IV sensing diaphragm shielded against volatile condensable process byproducts, combined with an ultrastable dual-zone temperature control system regulated to 45°C to deliver superior long-term accuracy, rapid thermal warmup, and fast response times.

Technical Specifications

▴Internal Sensor Temperature: Internally regulated to 45°C (113°F)

▴Input Power Requirement: ±15 VDC (±5%) standard

▴Operating Current (Warm-up): Maximum 600 mA draw

▴Operating Current (Sustained): 250 mA nominal current draw

▴Analog Output Signal: 0 to 10 VDC high-level output

Our company's advantage products

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Excitation cards : ABB,GE Marke

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➟ Over millions spares inventory.

➟ Fast lead times deliver uptime globally.

➟ 100% brand-new and original products.

➟ Competitive prices and specific dealer discounts.

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